What are the precautions for using a dry vacuum pump?

BOKE VAC

Dry‑type vacuum pumps operate without oil in the working chamber, offering numerous advantages and enhancing pump reliability. Below, we outline key precautions for using dry‑type vacuum pumps, with the hope of providing guidance to those concerned.

Dry‑type vacuum pumps operate without oil in the working chamber, offering numerous advantages and enhancing pump reliability. Below, we outline key considerations for using dry‑type vacuum pumps, with the hope of providing guidance to those involved.

Each type of dry vacuum pump has its own unique characteristics, along with distinct advantages and disadvantages. For a long time, operating costs have been a key factor influencing users’ selection. Increasingly, users recognize that the operational stability of vacuum pumps must also be taken into account—primarily because unexpected failures can reduce equipment efficiency, disrupt wafer production and delivery schedules, and even render finished wafers scrap, while also damaging other components of the system. It is important to note that, thanks largely to their single‑stage screw‑type design, these pumps use 60% fewer parts compared with multi‑stage models such as those employing impellers, claw rotors, or hybrid configurations. This translates into significant benefits in terms of stability and future maintenance costs. Today, dry vacuum pumps are gaining growing recognition from manufacturers and end‑users for their broad pumping speed range, simple and compact construction, friction‑free pump‑chamber components, long service life, low energy consumption, and absence of oil contamination.

When operating a dry vacuum pump, always check the connections of the equipment and piping before each startup. Before starting, verify that both the inlet and outlet lines are free of foreign objects, and open the outlet valve first to prevent pressure loss. Alternatively, after starting, open the inlet valve to avoid debris entering the chamber and causing blockages. Monitor the oil dipstick to ensure there is sufficient lubricant. If no viscous substances or dust are present, regularly clean the filter screen and the pump chamber. It is recommended to perform this cleaning each time prior to shutting down the pump. After an intermittent‑operation shutdown, if the pump fails to start smoothly, open the engine cover and turn the crankshaft 5–10 revolutions, or steam‑clean it for 10 minutes. When the dry vacuum pump is handling condensable gases or when ambient humidity is excessively high, introduce an adequate flow of dry air, and empty the pump chamber before stopping. Additionally, when the pump is idle for extended periods, close the inlet valve, run the vacuum pump for 20 minutes, then stop it to prevent water vapor from entering. Ensure that the circulating cooling‑water flow rate and temperature meet the specified technical requirements. If the cooling water supply is interrupted, shut down the pump. When the ambient temperature drops below zero, stop the dry vacuum pump and maintain the circulating cooling‑water flow to prevent ice formation inside the chamber. For condensable gases, position the exhaust line lower than the exhaust port, orient the port upward, connect a tee fitting, and link it to a recovery tank.

The above article outlines important precautions for using dry vacuum pumps and also recommends a reputable manufacturer in the field. If you have related needs, feel free to check them out—we hope this information proves helpful.